In the realm of precision machining for semiconductor manufacturing, a single technology often falls short of meeting complex requirements. In contrast, composite machining processes, by integrating the advantages of multiple technologies, are emerging as the "precision multiplier" for Showerhead manufacturing.
Technology Integration: The Synergistic Effect of 1 + 1 > 2
The core of composite machining processes lies in combining the strengths of different technologies to achieve a dual enhancement in both precision and efficiency. For instance, Coherent, a company in the United States, has developed a "laser + ion beam" composite machining system. This system first rapidly forms microholes using femtosecond lasers and then performs nanoscale corrections on the hole walls with ion beams. As a result, the aperture deviation is reduced from ±0.5μm to ±0.1μm, and the surface roughness Ra is less than 0.05μm, meeting the requirements of 3nm manufacturing processes.
Industry Practice: AMTD's Innovative Breakthrough
AMTD has achieved remarkable innovative results in applying composite machining processes to Showerhead manufacturing. Its R&D team has conducted in-depth research and successfully developed a composite machining process that combines "femtosecond laser + Atomic Layer Deposition (ALD)."
In actual production, AMTD first utilizes the ultra-high precision and "cold machining" characteristics of femtosecond lasers to rapidly and precisely form microhole arrays on Showerhead materials. The pulse width of femtosecond lasers is only 10⁻¹⁵ seconds, with an extremely short energy release time, effectively avoiding thermal damage to the material and laying a solid foundation for subsequent processing.
Subsequently, Atomic Layer Deposition technology is employed for fine treatment of the microholes. ALD technology can deposit specific materials on the hole walls with atomic-level precision, enabling further fine-tuning of the aperture and optimization of the hole wall surface. By precisely controlling the deposition parameters, AMTD has successfully reduced the aperture deviation to ±0.08μm, a significant improvement over traditional single-process methods. Meanwhile, the surface roughness Ra is less than 0.04μm, reaching an industry-leading level and fully meeting the stringent precision requirements for Showerheads in 3nm and below advanced manufacturing processes.
This innovative process has been successfully applied to the mass production of 12-inch Showerheads. During mass production, it not only ensures high-precision products but also significantly enhances production efficiency. Compared with imported products, the cost per unit has been reduced by 30%, effectively strengthening the product's competitiveness in the market. This has also vigorously promoted the localization process of the domestic semiconductor manufacturing industrial chain and reduced reliance on high-end foreign products.
Content Source: Frontiers of Composite Machining Technology, Research on the Semiconductor Equipment Industry
