In the field of precision machining for semiconductor manufacturing, femtosecond lasers are emerging as a revolutionary tool for Showerhead microhole machining due to their "cold machining" characteristics. Their ultra-short pulse properties enable the avoidance of heat-affected zones and achieve sub-micron-level precision machining, providing crucial support for the implementation of advanced manufacturing processes.
Technical Advantages: Precision and Efficiency of Cold Machining
The pulse width of a femtosecond laser is only 10⁻¹⁵ seconds, with an extremely short energy release time, enabling "cold machining" and preventing thermal damage to materials. In Showerhead manufacturing, femtosecond lasers can machine high-hardness materials (such as silicon carbide), with an aperture deviation of ≤ ±1μm and a hole wall roughness Ra < 0.2μm. The machining efficiency is more than three times higher than that of traditional Electrical Discharge Machining (EDM).
Industry Application: Breakthrough from Laboratory to Mass Production
AMTD has achieved remarkable results in applying femtosecond lasers to Showerhead microhole machining. Its R&D team has overcome multiple technical challenges and successfully developed a femtosecond laser machining system suitable for Showerhead manufacturing.
This system has achieved stable mass production of 12-inch Showerheads. In actual production, the machining time per piece has been significantly reduced from 12 hours with traditional processes to less than 2 hours, representing a qualitative leap in production efficiency. Meanwhile, thanks to the high-precision machining characteristics of femtosecond lasers and AMTD's precise control over process parameters, the product yield has significantly improved, and the overall cost has been reduced by over 40%.
Not only that, through continuous innovation, AMTD has further enhanced the machining precision to ±0.4μm, surpassing the industry average. Moreover, its equipment has achieved seamless integration with various processes such as chemical etching, establishing a comprehensive and efficient Showerhead manufacturing solution. This achievement has effectively driven the localization process of the industrial chain, increasing the localization rate of relevant domestic industrial chains from 15% to 40%. It has significantly reduced the dependence of domestic semiconductor manufacturing enterprises on foreign technologies and enhanced the competitiveness of China's semiconductor industry in the global market.
Content Source: White Paper on Laser Machining Technology, Research on the Localization of Semiconductor Equipment
