Core Role of the Sprinkler in Vacuum Coating1. Gas Uniform Distribution and Process Stabilityo Function: The showerhead delivers reactive gases (such as SiH₄, Ti(OEt)₄) uniformly to the wafer surface through a micro - hole array (with a pore diameter ran…
Time：2025-04-21
The concept of Chemical Mechanical Polishing (CMP) was first proposed by Walsh et al. in 1965 and has since evolved into an indispensable part of IC (Integrated Circuit) manufacturing processes. As chip fabrication technology has advanced, CMP technology
Time：2025-04-21
What are the types of coatings?Taking coatings on equipment/accessories as examples.How are coatings applied? Taking coatings on equipment/accessories as examples:1， Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD)2，Thermal Spray Techno…
Time：2025-04-17
Showerheads, as critical components in Plasma-Enhanced Chemical Vapor Deposition (PECVD) processes, fundamentally determine the uniformity of film deposition, process stability, and equipment lifespan. This article analyzes the technical functions of show
Time：2025-04-17
Role of Showerhead in Thin Film DepositionUniform Gas Distribution: During thin film deposition processes such as Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD), the Showerhead is used to uniformly distribute reactive gases onto the w
Time：2025-04-15
The autonomy and controllability of the semiconductor industry chain are gradually advancing upstream, and semiconductor components are expected to enter an explosive period of domestic substitution. Semiconductor components are located in the upstream of
Time：2025-04-14
The Shower Head (gas distributor in the form of a shower head) is usually positioned closely above the reaction zone and serves as the gas inlet, uniformly injecting reactive gases into the chamber through small holes on its surface. Its main functions ar
Time：2025-04-09
The upgrading and iteration of semiconductor equipment heavily rely on technological breakthroughs in precision components. As the cornerstone of semiconductor equipment, these components underpin the development of the equipment industry.Precision compon
Time：2025-04-09
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