In the highly precise and complex field of semiconductor manufacturing, each component is akin to a crucial gear in a sophisticated instrument. The micro-hole structure of core semiconductor equipment components stands as a quintessential example of precision manufacturing, serving as the precision code that unlocks the door to efficient and stable semiconductor production. AMTD, as a company deeply committed to this industry, fully understands the pivotal significance of micro-hole structures for the performance of semiconductor components and has consistently strived for exploration and breakthroughs in this area.
Micro-hole structures come in various forms. Straight holes are simple and direct, functioning like straight passageways that allow gases to flow smoothly through. They are suitable for scenarios where the gas flow requirements are relatively single and straightforward. Two-stage, three-stage, and four-stage holes, on the other hand, are like carefully designed steps. Through combinations of different diameters and lengths, they ingeniously meet various gas flow distribution needs. This diverse design is akin to a customized intelligent traffic system for gas flow, capable of precisely guiding gases to the required positions according to different process requirements, ensuring a stable and orderly gas supply during semiconductor manufacturing.
The parameters of micro-holes are controlled with extreme precision, bordering on the exacting. The diameter of micro-holes is precisely controlled within the range of 0.2 - 6mm. Although this range may seem narrow, even the slightest change in size can have a significant impact on gas flow. The uniformity, with a 3-sigma value of ≤3μm, indicates an extremely even distribution of micro-hole diameters. It's as if a group of well-trained soldiers are standing in neat and orderly rows, ensuring that gases flow uniformly when passing through the micro-holes and preventing situations where the local flow rate is either too high or too low. The dimensional tolerance of ±0.01mm and the positional tolerance of ≤0.03mm demand such high precision that they ensure the accurate installation positions of micro-holes on components. Just like every foundation stone in a building, they lay a solid foundation for the stability of the entire structure. The maximum aspect ratio of ≤50 limits the ratio of the depth to the diameter of micro-holes, ensuring that while meeting the gas flow requirements, the structural stability of the micro-holes and the efficiency of gas flow are not compromised due to excessive depth.
In components such as gas distribution devices, micro-hole structures resemble a precise "vascular network." Similar to how blood vessels in the human body precisely deliver blood to various "organs" in the body, micro-hole structures accurately transport gases to every "organ" in the semiconductor manufacturing process, providing a stable gas supply. Whether it's crucial process steps like etching, deposition, or cleaning, they all rely on the gas support provided by micro-hole structures. In essence, the precision of micro-hole structures directly determines the precision and quality of semiconductor manufacturing. Leveraging its exquisite craftsmanship and strict quality control in micro-hole structure manufacturing, AMTD has provided numerous high-quality components to the semiconductor industry, driving the industry to continuously progress towards higher precision and quality.
