In the field of semiconductor manufacturing, the Showerhead (spray head/gas distribution plate) serves as the core component of the gas distribution system, with its performance having a decisive impact on the uniformity of thin-film deposition on wafer surfaces, etching precision, and the stability of plasma distribution. As advanced processes advance towards the 3nm node and below, a single processing technique can no longer meet the demands. Against this backdrop, composite processing techniques, with their unique advantages, demonstrate significant innovation potential in Showerhead manufacturing.
I. Principles and Advantages of Composite Processing Techniques
Composite processing techniques involve the integration of two or more processing technologies, achieving efficient and high-precision machining through synergistic effects. In Showerhead manufacturing, composite processing techniques typically combine laser processing, grinding, chemical etching, and other technologies to achieve high-precision machining and surface treatment of microholes. The advantages are primarily reflected in the following aspects:
1.Improved Processing Precision: By combining laser processing with grinding, high-precision machining and surface polishing of microholes can be achieved, eliminating taper and burrs left by laser processing and improving hole wall perpendicularity and surface quality.
2.Expanded Material Applicability: Composite processing techniques can machine a variety of materials, including metals and high-hardness non-metallic materials, providing more material options for Showerhead manufacturing.
3.Enhanced Processing Efficiency: By optimizing the processing flow and parameters, composite processing techniques can achieve efficient machining, shortening the processing cycle and reducing production costs.
4.Improved Product Performance: Composite processing techniques can enhance the surface quality and microstructure of Showerheads, improving their corrosion resistance and stability, thereby enhancing semiconductor manufacturing yields and reliability.
II. Application Cases of Composite Processing Techniques in Showerhead Manufacturing
Take Anhui Boxin Micro Semiconductor Technology Co., Ltd. as an example. The company has adopted a "laser + grinding" composite processing technique in Showerhead manufacturing. First, femtosecond laser processing is used to rapidly form microhole arrays, achieving high-density and high-precision microhole machining. Then, diamond grinding is employed for precise polishing of the hole walls, eliminating taper and burrs left by laser processing and improving hole wall perpendicularity and surface quality. Through this composite processing technique, Anhui Boxin Micro has achieved mass production of 12-inch Showerheads, with hole wall perpendicularity reaching 90°±0.5°, meeting the demands of 5nm processes.
In addition, composite processing techniques are also applied to the surface functionalization treatment of Showerheads. By combining chemical etching with atomic layer deposition (ALD) technology, dense ceramic coatings (such as aluminum oxide, silicon nitride, etc.) can be deposited on the Showerhead surface, improving its corrosion resistance and stability. Meanwhile, by depositing fluorides or hydrophobic polymers via ALD, the surface energy of the Showerhead can be reduced, minimizing particle shedding and further enhancing semiconductor manufacturing yields and reliability.
III. Challenges and Future Prospects of Composite Processing Techniques
Despite the significant innovation potential of composite processing techniques in Showerhead manufacturing, they still face some challenges. Firstly, composite processing techniques require the coordinated operation of multiple pieces of equipment, increasing equipment investment and operational and maintenance costs. Secondly, the integration and optimization of different processing technologies necessitate in-depth technical research and experimental verification to ensure the stability and reliability of the processing process. Additionally, composite processing techniques demand high technical proficiency and experience from operators, necessitating enhanced talent development and technical training.
However, with continuous technological advancements and gradual cost reductions, composite processing techniques are expected to play a more significant role in Showerhead manufacturing.
In the future, through measures such as optimizing the processing flow, improving equipment automation levels, and strengthening talent development, composite processing techniques will achieve more efficient and precise machining processes, driving Showerhead manufacturing towards higher precision, lower costs, and greater intelligence. Meanwhile, as semiconductor manufacturing technologies continue to evolve, the performance requirements for Showerheads are also constantly increasing. Composite processing techniques will be combined with other advanced technologies to jointly drive innovation and development in semiconductor manufacturing technologies.
AMTD provides high-precision Showerhead (spray head/gas uniformity plate/gas distribution plate) services for core components. Its products mainly include Shower heads, Face plates, Blocker Plates, Top Plates, Shields, Liners, pumping rings, Edge Rings, and other core semiconductor equipment components. These products are widely used in semiconductor and display panel fields, exhibiting excellent performance and high market recognition.
Content Source: Compiled from "Precision Manufacturing of Showerheads: Technological Breakthroughs for the 'Invisible Champions' in the Semiconductor Industry", "Analysis of Showerhead (Spray Head/Gas Distribution Plate) Production and Processing Technologies", and relevant industry reports.
