In the field of semiconductor manufacturing, the Showerhead (also known as a spray shower head or gas distribution plate) serves as a core component of the gas distribution system. Its performance directly determines the uniformity of thin-film deposition on the wafer surface, etching precision, and the stability of plasma distribution. As advanced manufacturing processes advance towards the 3nm node and beyond, the machining precision requirements for the microholes in Showerheads have escalated to the sub-micron level, with pore diameter consistency needing to be controlled within ±0.5μm. This places extremely high standards on material selection and performance requirements.
I. Selection and Application of Metallic Materials
Metallic materials dominate the manufacturing of Showerheads, particularly aluminum alloys (such as 6061-T6), which are widely used in mid- to low-end processes due to their excellent thermal conductivity, strong corrosion resistance, and ease of machining. The thermal conductivity of aluminum alloys ensures the stability of the Showerhead under high-temperature conditions, while their corrosion resistance extends their service life. However, in high-end fields, such as extreme ultraviolet lithography (EUV) and atomic layer deposition (ALD) and other key processes, aluminum alloys struggle to meet the demands. In such cases, nickel-based alloys and titanium alloys, with their superior resistance to plasma bombardment and high-temperature stability, have gradually become the mainstream choices.
For instance, Anhui Boxin Micro Semiconductor Technology Co., Ltd. employs nickel-based alloys to manufacture Showerheads in high-end processes, significantly enhancing their high-temperature and corrosion resistance. Nickel-based alloys not only maintain structural stability at high temperatures but also effectively resist erosion by active particles in the plasma, thereby extending the service life of the Showerhead.
II. The Rise of Non-metallic Materials
With the continuous advancement of semiconductor manufacturing technology, the application of non-metallic materials in Showerhead manufacturing has become increasingly widespread. Materials such as chemical vapor deposition silicon carbide (CVD-SiC), aluminum nitride (AlN), quartz glass, and high-purity ceramics are extensively utilized in key processes like EUV and ALD due to their exceptional properties, including high-temperature resistance (withstanding temperatures above 600°C in the reaction chamber), chemical inertness (resisting erosion by corrosive gases such as Cl₂ and BCl₃), and thermal expansion compatibility (having a thermal expansion coefficient close to that of silicon wafers to avoid sealing failure caused by high-temperature deformation).
Taking Tokyo Electron Limited (TEL)'s EUV Showerhead as an example, it utilizes CVD-SiC material. By optimizing pore distribution and flow channel design, the deviation in thin-film thickness between the wafer edge and center regions has been reduced from ±3% to ±0.8%, significantly improving yield. CVD-SiC material not only exhibits extremely high high-temperature resistance but also maintains structural stability under extreme conditions, ensuring the uniformity and stability of gas distribution.
III. Comprehensive Consideration of Material Performance
When selecting materials for Showerheads, in addition to considering high-temperature resistance, corrosion resistance, and thermal expansion compatibility, it is also necessary to comprehensively evaluate factors such as machinability, cost-effectiveness, and environmental friendliness. For example, although silicon carbide material offers excellent performance, its high machining difficulty and cost limit its application in mid- to low-end processes. Therefore, in actual production, appropriate material combinations need to be selected based on specific process requirements and cost budgets.
Moreover, as semiconductor manufacturing technology continues to evolve, the performance requirements for Showerhead materials are also constantly increasing. In the future, novel composite materials and nanomaterials are expected to find applications in Showerhead manufacturing, further enhancing their performance and service life.
AMTD provides high-precision Showerhead (spray shower head/gas uniformity plate/gas distribution plate) services for core components. Its products mainly include semiconductor equipment core parts such as Shower heads, Face plates, Blocker Plates, Top Plates, Shields, Liners, pumping rings, and Edge Rings. These products are widely applied in the semiconductor and display panel industries, boasting excellent performance and high market recognition.
Content source: Compiled from "Analysis of Production and Processing Technology for Showerhead (Spray Shower Head/Gas Distribution Plate)", "Showerhead for Semiconductor Process Chambers", and relevant industry reports.
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