In the field of semiconductor manufacturing, the Showerhead (spray head/gas distribution plate) serves as the core component of the gas distribution system, with its performance having a decisive impact on the uniformity of thin film deposition on the wafer surface, etching accuracy, and the stability of plasma distribution. However, as advanced processes progress towards the 3nm node and below, traditional processing technologies face numerous limitations and challenges in the manufacturing of Showerheads.
I. Limitations of Mechanical Drilling
Mechanical drilling is one of the traditional methods for microhole processing, relying on hard alloy cutting tools for machining. However, in Showerhead manufacturing, mechanical drilling exhibits significant limitations. Firstly, tool wear is a severe issue; as the number of drilled holes increases, tool wear leads to an enlargement in hole diameter deviation, often exceeding 5μm, which fails to meet the requirements for sub-micron hole diameter consistency. Secondly, mechanical drilling is unable to process high-hardness materials, such as CVD-SiC, limiting its application in high-end processes. Additionally, the cutting forces and thermal effects generated by mechanical drilling may cause microscopic structural damage to the material, affecting the performance and lifespan of the Showerhead.
II. Challenges of Electrical Discharge Machining (EDM)
Electrical Discharge Machining (EDM) achieves microhole processing by eroding material through electrical sparks, suitable for processing conductive metallic materials. However, in Showerhead manufacturing, EDM technology also faces numerous challenges. Firstly, EDM processing creates a heat-affected zone (HAZ), resulting in a recast layer and microcracks on the hole wall, necessitating subsequent acid washing for removal, which increases processing costs and cycle times. Secondly, EDM processing is inefficient; machining a single 12-inch Showerhead requires over 10 tool changes and exceeds 20 hours, failing to meet the demands of large-scale production. Furthermore, the electrical erosion products generated during EDM processing may contaminate the reaction chamber, affecting the yield and reliability of semiconductor manufacturing.
III. Precision Control Challenges in Chemical Etching
Chemical etching forms microholes by corroding the material with a chemical solution. However, in Showerhead manufacturing, chemical etching presents precision control challenges. Firstly, the etching rate of chemical etching is influenced by various factors such as solution concentration and temperature, making it difficult to achieve high-precision hole diameter control. Secondly, the lateral etching phenomenon in chemical etching may lead to increased hole shape errors, affecting the consistency of gas flow rates. Additionally, the waste liquid treatment problem during chemical etching is also a significant challenge, requiring effective environmental protection measures to ensure waste liquid discharge compliance.
IV. Comprehensive Challenges of Traditional Processing Technologies
In addition to the specific limitations of the aforementioned technologies, traditional processing technologies also face comprehensive challenges in Showerhead manufacturing. Firstly, as process nodes continue to advance, the microhole size of Showerheads is decreasing while hole density is increasing, imposing higher requirements on the precision and efficiency of processing technologies. However, traditional processing technologies struggle to meet these demands, limiting the performance and lifespan of Showerheads. Secondly, the thermal effects, cutting forces, etc., generated by traditional processing technologies may cause microscopic structural damage to the material, affecting the stability and reliability of the Showerhead. Furthermore, the cost-effectiveness of traditional processing technologies is also a challenge, with high processing costs and lengthy processing cycles limiting their widespread application in semiconductor manufacturing.
AMTD provides high-precision Showerhead (spray head/gas uniformity plate/gas distribution plate) services for core components, with products primarily including Shower heads, Face plates, Blocker Plates, Top Plates, Shields, Liners, pumping rings, Edge Rings, and other core semiconductor equipment components. These products are widely used in semiconductor, display panel, and other fields, exhibiting exceptional performance and high market recognition.
Content Source: Compiled from "Analysis of Showerhead (Spray Head/Gas Distribution Plate) Production and Processing Technologies", "Microhole Processing of Showerheads: Precision Challenges and Breakthroughs in Semiconductor Manufacturing", and related industry reports.
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