Product Introduction
Shower Head, also known as a spray head or gas distribution plate/uniform gas distribution disk in Chinese, is a gas distribution device widely used in semiconductor manufacturing processes.
Our product line primarily includes core semiconductor equipment components such as Showerhead, faceplate, block plate, Top Plate, Shield, Liner, Pumping plate, and Edge Ring.
Product Features
High Precision: The showerhead is manufactured using high-precision machining equipment, ensuring consistent pore size in the small holes, which allows for uniform gas distribution across the wafer, guaranteeing high uniformity and consistency of the film layer.
High Cleanliness: Due to the extremely high cleanliness requirements of semiconductor manufacturing, the showerhead undergoes rigorous cleaning and treatment during production to ensure it is free of impurities and contamination, thereby improving the manufacturing quality and yield of the wafers.
Multi-composite Surface Treatment: The surface of the showerhead undergoes various processes such as sandblasting, anodizing, brush plating with nickel, and electrolytic polishing to enhance its corrosion resistance, wear resistance, and service life, ensuring stable operation during the wafer manufacturing process.
Product Applications
The showerhead is widely used in various processes such as PVD, CVD, PECVD, EPI, and etching in the manufacturing of semiconductor integrated circuits. It is a key component in various gas distribution processes. It can uniformly distribute reaction gases into the reaction chamber, ensuring that the semiconductor material receives uniform gas contact during the reaction process, thereby improving product quality and production efficiency.
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