The vigorous development of the semiconductor industry is inseparable from the support of precision machining technology. During the semiconductor manufacturing process, the machining accuracy of components such as Showerheads directly impacts process stability and chip performance.
The micro-hole machining accuracy requirements for Showerheads are extremely high, with hole diameter tolerances typically controlled within a very narrow range. To achieve this goal, AMTD has made substantial investments and innovations in machining equipment and processes. They have introduced internationally advanced CNC machining centers and inspection equipment, providing hardware support for high-precision machining. Meanwhile, AMTD's technical team continuously explores and optimizes machining processes. By improving tool paths and adjusting cutting parameters, they have enhanced the machining accuracy and consistency of micro-holes.
Thermal deformation is a critical issue that requires close attention during the machining process. The cutting heat generated during machining causes the temperature of components to rise, leading to dimensional changes. AMTD has adopted effective cooling measures, such as using high-performance cutting fluids and optimizing cooling system design, to promptly dissipate the cutting heat and reduce the impact of thermal deformation on machining accuracy. Additionally, by arranging (the correct word here after correction based on context, replacing the Chinese character) rationally the machining sequence and process steps, they have minimized the influence of residual stress on the dimensional stability of components.
Apart from micro-hole machining, the flatness and perpendicularity requirements regarding geometric accuracy for Showerheads are also very stringent. AMTD employs high-precision machining processes and inspection methods to ensure that the geometric accuracy of components meets the requirements. In terms of inspection, they utilize advanced instruments such as laser interferometers and roundness measuring instruments to accurately measure various geometric parameters of components, providing reliable data support for quality control.
AMTD has not only achieved remarkable success in Showerhead machining but is also continuously expanding and innovating in the field of precision machining for other semiconductor components. Guided by customer needs, they continuously enhance their technological capabilities and production capacity, making positive contributions to the development of the semiconductor industry.
Source: Based on "Precision Machining Technology" and "Fundamentals of Semiconductor Manufacturing Processes"
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