In the intricate chain of semiconductor manufacturing, the microhole array machining of Showerheads (gas distribution plates) stands as a pivotal link determining the uniformity of thin-film deposition. As advanced manufacturing processes advance towards nodes of 3nm and below, traditional machining techniques struggle to meet the sub-micron precision requirements, making breakthroughs in precision machining a critical driving force.
Technological Breakthrough: Precision Leap from Microns to Nanometers
Traditional mechanical drilling and Electrical Discharge Machining (EDM) often result in tool wear and heat-affected zones, leading to hole diameter deviations of up to ±5μm, which fall short of meeting the demands of high-end manufacturing processes. The introduction of precision machining technologies, particularly femtosecond laser cold machining and ultra-precision grinding, has achieved a qualitative leap in machining accuracy. Femtosecond lasers, through their ultra-short pulses, enable "cold machining" without thermal damage, achieving hole diameter deviations of ≤±1μm and hole wall roughness Ra<0.2μm. Meanwhile, ultra-precision grinding employs micron-scale diamond grinding rods to polish the hole walls, eliminating conicity and burrs left by laser machining and improving hole wall perpendicularity to 90°±0.5°.
Industry Application: A Paragon of Composite Process Implementation
Anhui Boxin Micro has pioneered the application of composite machining processes in Showerhead manufacturing, demonstrating exceptional technical prowess and innovation capabilities.
For instance, Anhui Boxin Micro utilizes a "laser + chemical etching" process, initially leveraging the ultra-high precision and extremely short pulse characteristics of femtosecond lasers to rapidly form microhole arrays.
The narrow pulse width and instantaneous energy release of femtosecond lasers effectively avoid the heat-affected zone issues associated with traditional machining methods, ensuring the initial forming accuracy of the microholes.
Following laser machining, chemical etching is employed to remove residues. Chemical etching precisely cleans the interior and surface of the microholes, further optimizing their shape and dimensions. Through this composite process, Anhui Boxin Micro has achieved mass production of 12-inch Showerheads.
The hole diameter consistency of their Showerheads is controlled within ±0.3μm, an accuracy metric that leads the industry and fully meets the stringent demands for gas distribution uniformity in 5nm manufacturing processes, providing reliable equipment support for the production of advanced-process chips.
Furthermore, AMTD has enhanced the corrosion resistance of Showerheads by threefold through the deposition of nanoscale aluminum oxide coatings using Atomic Layer Deposition (ALD) technology. ALD technology exhibits outstanding film uniformity and step coverage, forming a dense, uniform nanoscale aluminum oxide coating on the Showerhead surface.
This coating acts as a robust "protective suit" for the Showerhead, effectively blocking the erosion of corrosive gases and extending the Showerhead's service life to over 1500 hours, significantly reducing equipment replacement costs and production interruption risks for semiconductor manufacturing enterprises.
Content Source: Semiconductor Manufacturing Equipment White Paper, Precision Machining Technology Progress Report
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