In the field of semiconductor manufacturing, the surface treatment processes of Showerheads (shower nozzles/gas distribution plates) are of crucial importance for enhancing their performance, durability, and reliability. Here are several key surface treatment processes and their functions:
1. Precision Polishing
Purpose: To eliminate the taper and burrs left from micro-hole machining, and improve the perpendicularity of the hole walls and surface quality.
Process Method: Precision polishing techniques such as diamond grinding are employed to polish the hole walls.
Effect: It significantly improves the uniformity of thin-film deposition. For example, Anhui Boxin Microelectronics reduced the deviation in film thickness between the edge and the center of the wafer from ±3% to ±0.8% through precision polishing.
2. Combination of Chemical Etching and ALD Technology
Purpose: To deposit a dense ceramic coating on the surface of the Showerhead, enhancing its corrosion resistance and stability.
Process Method: By combining chemical etching with Atomic Layer Deposition (ALD) technology, ceramic coatings such as aluminum oxide and silicon nitride are deposited on the surface of the Showerhead.
Effect: For instance, Applied Materials Inc. used ALD technology to deposit a 100nm Al₂O₃ coating, reducing the corrosion rate of the Showerhead from 0.5nm/h to 0.02nm/h and extending its lifespan to over 2000 hours.
3. ALD Deposition of Fluoride or Hydrophobic Polymer Coatings
Purpose: To reduce the surface energy of the Showerhead, minimize particle shedding, and further improve the yield and reliability of semiconductor manufacturing.
Process Method: ALD technology is utilized to deposit coatings such as fluorides or hydrophobic polymers.
Effect: It significantly reduces particle shedding and enhances the yield of semiconductor manufacturing.
4. Surface Treatment in Composite Machining Processes
Purpose: To perform surface treatment on the Showerhead in composite machining processes (such as the "laser + grinding" process) to achieve an efficient and high-precision machining process.
Process Method: Combining the advantages of laser machining and grinding machining, micro-hole arrays are first rapidly formed through laser machining, and then the hole walls are precisely polished through grinding machining.
Effect: For example, Anhui Boxin Microelectronics achieved mass production of 12-inch Showerheads through the "laser + grinding" composite machining process, with a hole wall perpendicularity of 90°±0.5°, meeting the requirements of 5nm manufacturing processes.
AMITD provides high-precision Showerhead (shower nozzle/gas uniformity plate/gas distribution plate) services for core components. Its products mainly include Showerheads, Face plates, Blocker Plates, Top Plates, Shields, Liners, pumping rings, Edge Rings, and other core components of semiconductor equipment. These products are widely used in fields such as semiconductors and display panels, with excellent performance and high market recognition.
Content sources: Semiconductor Manufacturing Technology, Integrated Circuit Manufacturing Process and Equipment, Acta Electronica Sinica, Microelectronics, etc.
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