Showerhead Product Matrix — Full Coverage from Core to Periphery

In the field of semiconductor equipment core components, the Showerhead is merely the starting point. The complete product matrix built around the gas distribution system is the true reflection of an enterprise's comprehensive strength.

 

Three Types, Precisely Matching Process Requirements

Showerhead products are classified into Type A, Type B, and Type C, each corresponding to different gas flow distribution requirements and micropore structural forms (from straight holes to four-stage holes). This product segmentation strategy enables customers to select the optimal solution based on their specific process — rather than a "one-size-fits-all" standardized product. Micropore diameters range from 0.2 mm to 6 mm, with uniformity controlled within 3σ ≤ 3 μm, demonstrating exceptionally high process adaptability.

 

Peripheral Components: Maximizing Synergy

Peripheral components — including Face Plate, Blocker Plate, Top Plate, Shield, Liner, Pumping Ring, and Edge Ring — form a complete gas distribution system together with the Showerhead. By providing a full-suite solution, this approach eliminates compatibility risks and delivery uncertainties caused by multiple suppliers.

 

A Firm Practitioner of Domestic Substitution

With advanced technology and mature processes, domestic enterprises have established a solid customer base, strictly adhering to international standards, delivering high-precision services for core components, and setting an industry benchmark. AMTD, with its full-dimensional product matrix, is filling the supply chain gaps for domestic semiconductor equipment core components.

 

From a single Showerhead to a complete set of gas distribution system components, the comprehensive product matrix is injecting solid strength into the semiconductor industry's pursuit of autonomy and controllability.